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Principles of plasma discharges and materials processing

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Bibliographic Details
Main Authors: Lieberman Michael A
Group Author: Lichtenberg Allan J
Published: Wiley,
Publisher Address: New York
Publication Dates: c1994.
Literature type: Book
Language: English
Subjects:
Plasma dynamics
Thin films > Surfaces
Plasma etching
Plasma chemistry
Carrier Form: xxvi, 572 p.: ill. ; 25 cm.
ISBN: 0471005770
Index Number: O53
CLC: O53
Call Number: O53/L716/
Contents: "A Wiley-Interscience publication."
Includes bibliographical references (p. 559-564) and index.

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