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Principles of plasma discharges and materials processing

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Bibliographic Details
Main Authors: Lieberman M. A (Michael A.)
Group Author: Lichtenberg Allan J
Published: Wiley-Interscience,
Publisher Address: Hoboken, N.J.
Publication Dates: c2005.
Literature type: Book
Language: English
Edition: 2nd ed.
Subjects:
Plasma dynamics
Thin films > Surfaces
Plasma etching
Plasma chemistry > Industrial applications
Carrier Form: xxxv, 757 p.: ill. ; 25 cm.
ISBN: 0471720011 (hardcover)
9780471720010 (hardcover)
Index Number: O53
CLC: O53
Call Number: O53/L716/2nd.ed.
Contents: Includes bibliographical references (p. 735-748) and index.

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