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Proceedings of the First International Symposium on Electrochemical Microfabrication

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Bibliographic Details
Corporate Authors: International Symposium on Electrochemical Microfabrication (1st 1991 Phoenix, Ariz.); Electrochemical Society. Electrodeposition Division.
Group Author: Snyder Dexter D.; Datta Madhav.; Sheppard Keith.
Published: Electrochemical Society,
Publisher Address: Pennington, NJ
Publication Dates: c1992.
Literature type: Book
Language: English
Series: Electrochemical Society. Proceedings ; v. 92-3
Subjects:
Masks (Electronics) > Congresses.
Silicon > Congresses.
Microelectronics > Congresses.
Electrochemistry > Industrial applications > Congresses.
Carrier Form: ix, 393 p.: ill. ; 23 cm.
ISBN: 1566770025
Index Number: TH16
CLC: TH16-532
TQ15-532
Call Number: TQ15-532/I61/1991/
Contents: The symposium was held Oct. 14-16, 1991, in Phoenix, Ariz.
Includes bibliographical references and indexes.

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