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Crystalline defects and contamination：their impact and control in device manufacturing III : DECON 2001 : proceedings of the satellite symposium to ESSDERC 2001, Nuremberg, Germany

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Bibliographic Details
Corporate Authors: DECON 2001 (2001 Erlangen, Germany; Electrochemical Society. Electronics Division; European Solid State Device Research Conference 2001 Nuremberg, Germany)
Group Author: Kolbesen Bernd O
Published: Electrochemical Society,
Publisher Address: Pennington, N.J.
Publication Dates: c2001.
Literature type: Book
Language: English
Series: Proceedings ; v. 2001-29
Subjects:
Integrated circuits > Very large scale integration
Crystals > Defects
Carrier Form: x, 362 p.: ill. ; 23 cm.
ISBN: 1566773636
Index Number: TN43
CLC: TN43-532
TN470.5-532-532
Call Number: TN470.5-532/C957/2001
Contents: "DECON 2001 ... held September 13/14 at Fraunhofer Institute of Integrated Circuits (IIS-B) in Erlangen/Germany"--Pref.
Includes bibliographical references and indexes.

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