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Author: Blanpain, R.,1932-

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Micro- and nano-electronics 2003：6-10 October 2003, Zvenigorod, Russia

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Bibliographic Details
Corporate Authors: ICMNE-2003 (2003 Zvenigorod, Russia); Society of Photo-optical Instrumentation Engineers. Russian Chapter.; Fiziko-tekhnologicheskiĭ institut (Rossiĭskai︠a︡ akademii︠a︡ nauk); Russia (Federation). Ministerstvo promyshlennosti, nauki i tekhnologiĭ.; Society of Photo-Optical Instrumentation Engineers
Group Author: Orlikovskiĭ A. A.; (Aleksandr Aleksandrovich); Valiev Kamilʹ Akhmetovich.
Published: SPIE,
Publisher Address: Bellingham, Wash., USA
Publication Dates: c2004.
Literature type: Book
Language: English
Series: SPIE proceedings series ; v. 5401
Subjects:
Nanotechnology.
Lithography.
Photonics > Materials.
Microelectronics
Carrier Form: xvii, 762 p.: ill. ; 28 cm.
ISBN: 0819453242
Index Number: TN4
CLC: TN4-532
Call Number: TN4-532/M626-4/2003
Contents: "Selected papers ... ICMNE-2003"--P. xvii.
Includes bibliographical references and index.

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