Micromachining and microfabrication process technology VI:18-20 September 2000, Santa Clara, USA
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Corporate Authors: | ; ; ; |
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Group Author: | ; |
Published: |
SPIE,
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Publisher Address: | Bellingham, Wash., USA |
Publication Dates: | c2000. |
Literature type: | Book |
Language: | English |
Series: |
SPIE proceedings series ; v. 4174 |
Subjects: | |
Carrier Form: | x, 524 p.: ill. ; 28 cm. |
ISBN: | 0819438308 |
Index Number: | TH11 |
CLC: |
TH11-532 TB4-532 |
Call Number: | TH11-532/M626.2/2000 |
Contents: | Includes bibliographical references and index. |