Cover is for reference only

Micromachining and microfabrication process technology VI：18-20 September 2000, Santa Clara, USA

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Bibliographic Details
Corporate Authors: Semiconductor Equipment and Materials International; Solid State Technology Organization; Sandia National Laboratories; Society of Photo-Optical Instrumentation Engineers
Group Author: Yasaitis John; Karam Jean-Michel
Published: SPIE,
Publisher Address: Bellingham, Wash., USA
Publication Dates: c2000.
Literature type: Book
Language: English
Series: SPIE proceedings series ; v. 4174
Subjects:
Microfabrication
Electromechanical devices > Design and construction
Micromachining
Carrier Form: x, 524 p.: ill. ; 28 cm.
ISBN: 0819438308
Index Number: TH11
CLC: TH11-532
TB4-532
Call Number: TH11-532/M626.2/2000
Contents: Includes bibliographical references and index.

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