Screen LibraryAtomic layer deposition：principles, characteristics, and nanotechnology applications
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| Main Authors: | |
|---|---|
| Group Author: | ; ; |
| Published: |
Scrivener Publishing,
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| Publisher Address: | Salem, Massachusetts |
| Publication Dates: | 2013. |
| Literature type: | Book |
| Language: | English |
| Edition: | 2nd Edition. |
| Subjects: | |
| Carrier Form: | xv, 253 p.: ill. ; 25 cm. |
| ISBN: |
9781118062777 (cloth : alk. paper) 1118062779 (cloth : alk. paper) |
| Index Number: | O641 |
| CLC: |
O641 O647.11 |
| Call Number: | O641/K112/2nd ed. |
| Contents: | Includes bibliographical references and index. |