Optical Metrology and Inspection for Industrial Applications VII : 11-16 October 2020, Online only, China /

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Bibliographic Details
Corporate Authors: Optical Metrology and Inspection for Industrial Applications (Conference) Online only, China); SPIE (Society); Zhongguo guang xue xue hui; Qing hua da xue (Beijing, China)‏; Guo jia zi ran ke xue ji jin wei yuan hui (China)‏; Zhongguo ke xue ji shu xie hui‏
Group Author: Han, Sen; Ehret, Gerd; Chen, Benyong
Published: SPIE,
Publisher Address: Bellingham, Washington :
Publication Dates: [2020]
Literature type: Book
Language: English
Series: Proceedings of SPIE, volume 11552
Subjects:
Item Description: "SPIE/COS photonics Asia"--Cover.
Carrier Form: 1 volume (various pagings) : illustrations ; 28 cm.
Bibliography: Includes bibliographical references.
ISBN: 9781510639195
CLC: TB133-532
TB96-532
Call Number: TB96-532/O626-4/2020