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2003 proceedings：Eighth International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference (CMP-MIC), February 19-21, 2003, Marina Beach Marriott Hotel, Marina Del Rey, CA : a specialty conference of Microelectronics Institute Inter on-chip Connection.

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Bibliographic Details
Corporate Authors: International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference (8th 2003 Marina Del Rey, Calif; Microelectronics Institute Inter on-chip Connection
Published: IMIC Headquarters?,
Publisher Address: [Tampa, Fla.
Publication Dates: 2003]
Literature type: Book
Language: English
Subjects:
Integrated circuits > Ultra large scale integration > Design and construction
Integrated circuits > Very large scale integration > Design and construction
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Carrier Form: 558 p.: ill. ; 28 cm.
Index Number: TN47
CLC: TN47-532
Call Number: TN47-532/I612/2003

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