2003 proceedings：Eighth International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference (CMP-MIC), February 19-21, 2003, Marina Beach Marriott Hotel, Marina Del Rey, CA : a specialty conference of Microelectronics Institute Inter on-chip Connection.

Corporate Authors: International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference (8th 2003 Marina Del Rey, Calif; Microelectronics Institute Inter on-chip Connection
Published: IMIC Headquarters?,
Publication Dates: 2003]
Call Number: TN47-532/I612/2003