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Micromachining and microfabrication：28-30 November 2000, Singapore

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Bibliographic Details
Corporate Authors: Nanyang Technological University; Institute of Physics, Singapore; Society of Photo-Optical Instrumentation Engineers
Group Author: Parameswaran Ash M; Tay Francis E. H; Chau Kevin
Published: SPIE,
Publisher Address: Bellingham, Wash., USA
Publication Dates: c2000.
Literature type: Book
Language: English
Series: SPIE proceedings series ; v. 4230
Subjects:
Microfabrication
Microelectromechanical systems
Micromachining
Carrier Form: vii, 248 p.: ill. ; 28 cm.
ISBN: 0819439029
Index Number: TH11
CLC: TH11-532
TB4-532
Call Number: TH11-532/M626/2000
Contents: Includes bibliographical references and index.

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