Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control
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Corporate Authors: | ; ; |
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Group Author: | ; |
Published: |
Electrochemical Society,
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Publisher Address: | Pennington, NJ |
Publication Dates: | c1993. |
Literature type: | Book |
Language: | English |
Series: |
The Electrochemical Society proceedings ; v. 93-21 |
Subjects: | |
Carrier Form: | x, 438 p.: ill. ; 23 cm. |
ISBN: | 1566770661 |
Index Number: | TN405 |
CLC: | TN405.98-532 |
Call Number: | TN405.98-532/S989/1993/ |
Contents: |
Papers were presented at the USA-Japan joint symposium held in Honolulu, Hi., May 19-21, 1993. Includes bibliographical references and indexes. |