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Spectroscopic techniques for semiconductor industry /

"The unique compendium presents special principles and techniques of spectroscopic measurements that are used in semiconductor manufacturing. Since industrial applications of spectroscopy are significantly different from those traditionally used in scientific laboratories, the design concepts a...

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Bibliographic Details
Main Authors: Protopopov, V. V. (Vladimir Vsevolodovich)
Published: World Scientific,
Publisher Address: Hackensack, New Jersey :
Publication Dates: [2023]
Literature type: Book
Language: English
Subjects:
Spectrum analysis > Industrial applications.
Semiconductors > Design and construction.
Summary: "The unique compendium presents special principles and techniques of spectroscopic measurements that are used in semiconductor manufacturing. Since industrial applications of spectroscopy are significantly different from those traditionally used in scientific laboratories, the design concepts and characteristics of industrial spectroscopic devices may vary significantly from conventional systems. These peculiarities are thus succinctly summarized in this volume for a wide audience of students, engineers, and scientific workers. Exceptionally well-illustrated with practical solutions in detail, this useful reference text will open new horizons in new research areas"--
Carrier Form: xiv, 310 pages : illustrations (some color) ; 29 cm
Bibliography: Includes bibliographical references and index.
ISBN: 9789811257599
9811257590
Index Number: QC451
CLC: O433.4
Call Number: O433.4/P967
Contents: Basics of grating spectrometers -- Basics of Fourier-transform spectrometers -- High-resolution spectroscopy -- Imaging spectrometers -- Gated intensified spectrometers -- Modulation-sensitive and frequency-selective spectroscopy -- Optical diagnostics in plasma etching machines -- Spectral reflectometry -- Related non-spectroscopic techniques.

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