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Thin film materials technology：sputtering of compound materials

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Bibliographic Details
Main Authors: Wasa Kiyotaka.
Group Author: Kitabatake Makoto.; Adachi Hideaki.
Published: William Andrew Pub.,
Publisher Address: Norwich, NY
Publication Dates: c2004.
Literature type: Book
Language: English
Subjects:
Cathode sputtering (Plating process)
Thin films
Carrier Form: xiv, 518 p.: ill. ; 24 cm.
ISBN: 0815514832 (alk. paper)
Index Number: TB43
CLC: TB43
TG174.444
TB330.4
Call Number: TB330.4/W312
Contents: Includes bibliographical references and index.

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