The design, testing, and analysis of a comprehensive test pattern for measuring CMOS/SOS process performance and control /
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Main Authors: | |
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Corporate Authors: | ; |
Published: |
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Literature type: | Book |
Language: | English |
Series: |
NBS special publication ;
400-66 Semiconductor measurement technology |
Subjects: | |
Item Description: |
"Electron Devices Division, Center for Electronics and Electrical Engineering, National Engineering Laboratory, National Bureau of Standards." S/N 003-003-02345-1. |
Carrier Form: | v, 142 p. : ill. ; 26 cm. |
Bibliography: | Includes bibliographical references. |
Index Number: | QC100 |
CLC: | TN407 |
Call Number: | TN407/L755 |