Screen LibraryThe design, testing, and analysis of a comprehensive test pattern for measuring CMOS/SOS process performance and control /
Saved in:
| Main Authors: | |
|---|---|
| Corporate Authors: | ; |
| Published: |
|
| Literature type: | Book |
| Language: | English |
| Series: |
NBS special publication ;
400-66 Semiconductor measurement technology |
| Subjects: | |
| Item Description: |
"Electron Devices Division, Center for Electronics and Electrical Engineering, National Engineering Laboratory, National Bureau of Standards." S/N 003-003-02345-1. |
| Carrier Form: | v, 142 p. : ill. ; 26 cm. |
| Bibliography: | Includes bibliographical references. |
| Index Number: | QC100 |
| CLC: | TN407 |
| Call Number: | TN407/L755 |