Semiconductor silicon 1981:proceedings of the fourth International Symposium on Silicon Materials Science and Technology

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Bibliographic Details
Corporate Authors: International Symposium on Silicon Materials Science and Technology (4th 1981 Minneapolis; Electrochemical Society. Electronics Division; Electrochemical Society. Dielectrics and Insulation Division
Group Author: Huff Howard R
Published: Electrochemical Society,
Publisher Address: Pennington, N.J.
Publication Dates: c1981.
Literature type: Book
Language: English
Subjects:
Carrier Form: xiii, 1049 p.: ill. ; 23 cm.
Index Number: TN304
CLC: TN304.1-532
Call Number: TN304.1-53/I61/1981/
Contents: Includes bibliographical references and indexes.