Semiconductor silicon 2002:proceedings of the Ninth International Symposium on Silicon Materials Science and Technology

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Bibliographic Details
Corporate Authors: International Symposium on Silicon Materials Science and Technology (9th 2002 Philadelphia, Pa; Electrochemical Society. Electronics Division
Group Author: Fábry László; Kishino Seigo; Huff Howard R
Published: Electrochemical Society,
Publisher Address: Pennington, N.J.
Publication Dates: c2002.
Literature type: Book
Language: English
Series: Proceedings ; v. 2002-2
Subjects:
Carrier Form: 2 v.: ill. ; 24 cm.
ISBN: 1566773687 (v. 1)
1566773733 (v. 2)
1566773741 (set)
Index Number: TN304
CLC: TN304.1-532
Call Number: TN304.1-532/I61/2002/v.2
Contents: " ... contains papers presented at the Ninth International Symposium on Silicon Materials Science and Technology, held May 13-17, 2002 in Philadelphia ... Sponsored by the Electronics Division of the Electrochemical Society ..."--Pref.
Includes bibliographical references and index.