Semiconductor silicon 2002:proceedings of the Ninth International Symposium on Silicon Materials Science and Technology
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Corporate Authors: | ; |
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Group Author: | ; ; |
Published: |
Electrochemical Society,
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Publisher Address: | Pennington, N.J. |
Publication Dates: | c2002. |
Literature type: | Book |
Language: | English |
Series: |
Proceedings ; v. 2002-2 |
Subjects: | |
Carrier Form: | 2 v.: ill. ; 24 cm. |
ISBN: |
1566773687 (v. 1) 1566773733 (v. 2) 1566773741 (set) |
Index Number: | TN304 |
CLC: | TN304.1-532 |
Call Number: | TN304.1-532/I61/2002/v.2 |
Contents: |
" ... contains papers presented at the Ninth International Symposium on Silicon Materials Science and Technology, held May 13-17, 2002 in Philadelphia ... Sponsored by the Electronics Division of the Electrochemical Society ..."--Pref. Includes bibliographical references and index. |