Ultra clean processing of semiconductor surfaces XIV : 14th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (14th UCPSS 2018) /
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Corporate Authors: | |
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Group Author: | ; ; |
Published: |
Scientific.Net,
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Publisher Address: | Zurch, Switzerland : |
Publication Dates: | [2018] |
Literature type: | Book |
Language: | English |
Series: |
Diffusion and defect data. Pt. B, Solid state phenomena ; volume 282. 1012-0394 |
Subjects: | |
Item Description: |
"Selected, peer reviewed papers from the 14th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (14th UCPSS 2018), September 3-5, 2018, Leuven, Belgium." "ISSN cd 1662-9787, ISSN 1662-9779"--Title page verso. |
Carrier Form: | xiv, 341 pages : illustrations ; 24 cm. |
Bibliography: | Includes bibliographical references and indexes. |
ISBN: |
9783035714173 3035714177 |
CLC: | TN305.2-532 |
Call Number: | TN305.2-532/I617/2018 |