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Ultra clean processing of semiconductor surfaces XIV : 14th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (14th UCPSS 2018) /

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Bibliographic Details
Corporate Authors: International Symposium on Ultra Clean Processing of Semiconductor Surfaces Louvain, Belgium
Group Author: Mertens, Paul (Editor); Meuris, Marc (Editor); Heyns, Marc (Editor)
Published: Scientific.Net,
Publisher Address: Zurch, Switzerland :
Publication Dates: [2018]
Literature type: Book
Language: English
Series: Diffusion and defect data. Pt. B, Solid state phenomena ; volume 282. 1012-0394
Subjects:
Semiconductors > Surfaces > Congresses
Item Description: "Selected, peer reviewed papers from the 14th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (14th UCPSS 2018), September 3-5, 2018, Leuven, Belgium."
"ISSN cd 1662-9787, ISSN 1662-9779"--Title page verso.
Carrier Form: xiv, 341 pages : illustrations ; 24 cm.
Bibliography: Includes bibliographical references and indexes.
ISBN: 9783035714173
3035714177
CLC: TN305.2-532
Call Number: TN305.2-532/I617/2018

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