Ultra clean processing of silicon surfaces 2000:proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS 2000), held in Ostend, Belgium, September 18-20, 2000
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Corporate Authors: | |
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Group Author: | ; ; |
Published: |
Scitec Publications,
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Publisher Address: | Zeurich-Uetikon, Switzerland |
Publication Dates: | c2001. |
Literature type: | Book |
Language: | English |
Series: |
Solid state phenomena ; v. 76-77. |
Subjects: | |
Carrier Form: | xiii, 321 p.: ill. ; 26 cm. |
ISBN: | 3908450578 |
Index Number: | TN305 |
CLC: | TN305.2-532 |
Call Number: | TN305.2-532/I617/2000 |
Contents: | Includes bibliographical references and indexes. |