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Micro- and nanoelectronics 2005：3-7 October 2005, Zvenigorod, Russia

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Bibliographic Details
Corporate Authors: ICMNE-2005 (2005 Zvenigorod, Russia); Society of Photo-optical Instrumentation Engineers. Russian Chapter.; Fiziko-tekhnologicheski?i institut (Rossi?iska?i·Ơa akademi?i·Ơa nauk); Russia (Federation). Ministerstvo nauki, vysshe?i shkoly i tekhnichesko?i politiki.; Society of Photo-Optical Instrumentation Engineers
Group Author: Orlikovski?i A. A.; (Aleksandr Aleksandrovich); Valiev KamilŁ ︡Akhmetovich.
Published: SPIE,
Publisher Address: Bellingham, Wash., USA
Publication Dates: c2006.
Literature type: Book
Language: English
Series: Proceedings of SPIE ; v. 6260
Subjects:
Nanotechnology.
Lithography.
Photonics > Materials.
Microelectronics
Carrier Form: 1 v. (various pagings): ill. ; 28 cm.
ISBN: 0819463256
Index Number: TN4
CLC: TN4-532
Call Number: TN4-532/M626-4/2005
Contents: "This proceedings volume contains selected papers from those presented at the International Conference on Micro- and Nanoelectronics 2005 (ICMNE-2005)"--P. xv.
Includes bibliographical references and author index.

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