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Semiconductor processing：a symposium

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Bibliographic Details
Corporate Authors: ASTM Committee F-1 on Electronics.; Symposium on Semiconductor Processing 1984 San Jose, Calif.) (San Jose, Calif.))
Group Author: Gupta D. C.; (Dinesh C.)
Published: ASTM,
Publisher Address: Philadelphia, PA
Publication Dates: c1984.
Literature type: Book
Language: English
Series: ASTM special technical publications ; 850
Subjects:
Semiconductor industry > Congresses.
Carrier Form: 671 p.: ill. ; 24 cm.
ISBN: 0803104030
Index Number: TN303
CLC: TN303-532
Call Number: TN303-53/S471/
Contents: "ASTM publication code number (PCN) 04-850000-46."
Includes bibliographies and index.

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