Semiconductor processing:a symposium
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Corporate Authors: | ; |
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Group Author: | ; |
Published: |
ASTM,
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Publisher Address: | Philadelphia, PA |
Publication Dates: | c1984. |
Literature type: | Book |
Language: | English |
Series: |
ASTM special technical publications ; 850 |
Subjects: | |
Carrier Form: | 671 p.: ill. ; 24 cm. |
ISBN: | 0803104030 |
Index Number: | TN303 |
CLC: | TN303-532 |
Call Number: | TN303-53/S471/ |
Contents: |
"ASTM publication code number (PCN) 04-850000-46." Includes bibliographies and index. |