Screen Library半导体制造基础 = Fundamentals of semiconductor fabrication
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| Main Authors: | ; |
|---|---|
| Group Author: | |
| Published: |
人民邮电出版社
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| Publisher Address: | 北京 |
| Publication Dates: | 2007 |
| Literature type: | Book |
| Language: | Chinese |
| Series: |
图灵电子与电气工程丛书 |
| Subjects: | |
| Carrier Form: | 268页: 图 ; 24cm |
| ISBN: | 978-7-115-16639-5 |
| Index Number: | TN305 |
| CLC: | TN305 |
| Call Number: | TN305/4895 |
| Contents: | 本书在简要介绍半导体制造流程的基础上，着力从理论和实践两个方面对晶体生长、硅氧化、光刻、刻蚀、扩散、离子注入和薄膜沉积等主要制备步骤进行详细探讨。 |