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Process and equipment control in microelectronic manufacturing II：30-31 May, 2001, Edinburgh, UK

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Bibliographic Details
Corporate Authors: Scottish Enterprise; European Optical Society; Institution of Electrical Engineers; Society of Photo-Optical Instrumentation Engineers
Group Author: Fallon Martin
Published: SPIE,
Publisher Address: Bellingham, Washington
Publication Dates: c2001.
Literature type: Book
Language: English
Series: SPIE proceedings series ; v. 4405
Subjects:
Integrated circuits > Very large scale integration > Design and construction
Microelectronics > Materials
Microelectronics industry > Production control
Carrier Form: v, 158 p.: ill. ; 28 cm.
ISBN: 0819441066
Index Number: TN405
CLC: TN405-532
Call Number: TN405-532/P963.1/2001
Contents: Includes bibliographic references and author index.

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