VLSI electronics microstructure science.. V.21,, beam processing technologies
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Group Author: | ; ; |
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Published: |
Academic Press.
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Literature type: | Book |
Language: | English |
Subjects: | |
Carrier Form: | xii, 546 p.: ; 24 cm. |
ISBN: | 012234121X |
Index Number: | TN47 |
CLC: | TN47 |
Call Number: | TN47/V871/ |