Screen LibraryVLSI electronics microstructure science.. V.21,, beam processing technologies
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| Group Author: | ; ; |
|---|---|
| Published: |
Academic Press.
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| Literature type: | Book |
| Language: | English |
| Subjects: | |
| Carrier Form: | xii, 546 p.: ; 24 cm. |
| ISBN: | 012234121X |
| Index Number: | TN47 |
| CLC: | TN47 |
| Call Number: | TN47/V871/ |