Dimensional optical metrology and inspection for practical applications V : 20 April 2016, Baltimore, Maryland, United States /

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Bibliographic Details
Corporate Authors: SPIE Society
Group Author: Harding, Kevin G; Zhang, Song
Published: SPIE,
Publisher Address: Bellingham, Washington :
Publication Dates: [2016]
Literature type: Book
Language: English
Undetermined
Series: Proceedings of SPIE, volume 9868
Subjects:
Item Description: "SPIE Defense + Commercial Sensing" -- Cover.
Carrier Form: 1 volume (various pagings) : illustrations, forms ; 28 cm.
Bibliography: Includes bibliographical references.
ISBN: 9781510601093 (paperback) :
1510601090 (paperback)
CLC: TB96-532
Call Number: TB96-532/D582/2016