Plasma processing:proceedings of the third Symposium on Plasma Processing
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Corporate Authors: | ; ; |
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Group Author: | ; ; |
Published: |
Electrochemical Society,
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Publisher Address: | Pennington, N.J. (10 S. Main St., Pennington 08534) |
Publication Dates: | c1982. |
Literature type: | Book |
Language: | English |
Series: |
Proceedings / The Electrochemical Society ; v. 82-6 |
Subjects: | |
Carrier Form: | xi, 516 p.: ill. ; 23 cm. |
Index Number: | TN403 |
CLC: | TN403-532 |
Call Number: | TN403-53/I61/1981 |
Contents: | Includes bibliographical references and indexes. |