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Plasma processing：proceedings of the third Symposium on Plasma Processing

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Bibliographic Details
Corporate Authors: Symposium on Plasma Processing (3rd 1981 Denver, Colo; Electrochemical Society. Electronics Division; Electrochemical Society. Dielectrics and Insulation Division
Group Author: Frieser R. G; Mathad G. S; Dieleman J
Published: Electrochemical Society,
Publisher Address: Pennington, N.J. (10 S. Main St., Pennington 08534)
Publication Dates: c1982.
Literature type: Book
Language: English
Series: Proceedings / The Electrochemical Society ; v. 82-6
Subjects:
Plasma engineering
Carrier Form: xi, 516 p.: ill. ; 23 cm.
Index Number: TN403
CLC: TN403-532
Call Number: TN403-53/I61/1981
Contents: Includes bibliographical references and indexes.

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