Screen Library固体薄膜材料与制备技术 = Thin solid film materials and preparation technology
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| Main Authors: | |
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| Published: |
科学出版社
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| Publisher Address: | 北京 |
| Publication Dates: | 2008 |
| Literature type: | Book |
| Language: | Chinese |
| Subjects: | |
| Carrier Form: | 131页: ; 24cm |
| ISBN: | 978-7-03-021206-1 |
| Index Number: | TB383 |
| CLC: | TB383 |
| Call Number: | TB383/3231 |
| Contents: | 本书共分10章，内容包括：薄膜的特征、真空技术基础、等离子体技术基础、薄膜的物理气相沉积、化学气相沉积、膜厚和沉积速率的测量等。 |
| Note: | 编著者还有：江美福、辛煜、叶超 |