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Polymers for microelectronics：resists and dielectrics

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Bibliographic Details
Corporate Authors: American Chemical Society. Meeting 1992 San Francisco, Calif.) (San Francisco, Calif.)); American Chemical Society. Division of Polymeric Materials: Science and Engineering.
Group Author: Willson C. G.; (C. Grant) 1939-; Tagawa Seiichi.; Thompson Larry F., 1944-
Published: American Chemical Society,
Publisher Address: Washington, DC
Publication Dates: 1994.
Literature type: Book
Language: English
Series: ACS symposium series ; 537
Subjects:
Polymers > Congresses.
Microelectronics > Congresses. > Congresses.
Carrier Form: xii, 571 p.: ill. ; 24 cm.
ISBN: 0841227217 (alk. paper)
Index Number: TN4
CLC: TN4-532
Call Number: TN4-532/P783/1992/
Contents: "Developed from a symposium sponsored by the Division of Polymeri Materials: Science and Engineering, Inc., of the American Chemical Society and the Society of Polymer Science, Japan, at the 203rd National Meeting of the American Chemical Society, San Francisco, California, April 5-10, 1992."
Includes bibliographical references and indexes.

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