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Nano- and microtechnology：materials, processes, packaging and systems : 16-18 December 2002, Melbourne, Australia

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Bibliographic Details
Corporate Authors: RMIT University; Swinburne University of Technology; International Symposium on Smart Materials, Nano-, and Micro-Smart Systems (2002 RMIT University); Society of Photo-Optical Instrumentation Engineers
Group Author: Malshe Ajay P; Maeda Ryutaro; Sood Dinesh K
Published: SPIE,
Publisher Address: Bellingham, Wash., USA
Publication Dates: c2002.
Literature type: Book
Language: English
Series: SPIE proceedings series ; v. 4936
Subjects:
Microelectromechanical systems
Nanotechnology
Mechatronics
Microelectronics
Carrier Form: xi, 476 p.: ill. ; 28 cm.
ISBN: 0819447315
Index Number: TB4
CLC: TB4-532
TB383-532
TN4-532
TN2-532
Call Number: TB383-532/N186/2002
Contents: Includes bibliographical references and index.

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