Nano- and microtechnology：materials, processes, packaging and systems : 16-18 December 2002, Melbourne, Australia

Corporate Authors: RMIT University; Swinburne University of Technology; International Symposium on Smart Materials, Nano-, and Micro-Smart Systems (2002 RMIT University); Society of Photo-Optical Instrumentation Engineers
Group Author: Malshe Ajay P; Maeda Ryutaro; Sood Dinesh K
Published: SPIE,
Publication Dates: c2002.
Call Number: TB383-532/N186/2002