Silicon device processing:proceedings

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Bibliographic Details
Corporate Authors: Symposium on Silicon Device Processing (1970 Gaithersburg, Md; American Society for Testing and Materials. Committee F-1 on Materials for Electron Devices and Microelectronics
Group Author: Marsden Charles P (ed.)
Published: U.S. National Bureau of Standards; for sale by the Supt. of Docs., U.S. Govt. Print. Off.,
Publisher Address: Washington
Publication Dates: 1970.
Literature type: Book
Language: English
Series: National Bureau of Standards special publication ; 337
Subjects:
Item Description: Technical Report Archive & Image Library (TRAIL)
Carrier Form: x, 457 p.: ill. ; 27 cm.
Index Number: TN304
CLC: TN304.1-532
Call Number: TN304.1-532/S989/1970
Contents: "A United States Department of Commerce publication."
"CODEN: XNBSA."
"Held ... under the sponsorship of Committee F-1 of the American Society for Testing and Materials and the National Bureau of Standards."
Includes bibliographical references.