Silicon device processing:proceedings
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Corporate Authors: | ; |
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Group Author: | |
Published: |
U.S. National Bureau of Standards; for sale by the Supt. of Docs., U.S. Govt. Print. Off.,
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Publisher Address: | Washington |
Publication Dates: | 1970. |
Literature type: | Book |
Language: | English |
Series: |
National Bureau of Standards special publication ; 337 |
Subjects: | |
Item Description: | Technical Report Archive & Image Library (TRAIL) |
Carrier Form: | x, 457 p.: ill. ; 27 cm. |
Index Number: | TN304 |
CLC: | TN304.1-532 |
Call Number: | TN304.1-532/S989/1970 |
Contents: |
"A United States Department of Commerce publication." "CODEN: XNBSA." "Held ... under the sponsorship of Committee F-1 of the American Society for Testing and Materials and the National Bureau of Standards." Includes bibliographical references. |