Plasma electronics : applications in microelectronic device fabrication /
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Main Authors: | |
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Group Author: | |
Published: |
CRC Press, Taylor & Francis Group,
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Publisher Address: | Boca Raton : |
Publication Dates: | [2015] |
Literature type: | Book |
Language: | English |
Edition: | Second edition. |
Subjects: | |
Carrier Form: | xxxv, 376 pages : illustrations ; 24 cm |
Bibliography: | Includes bibliographical references and index. |
ISBN: |
9781482222050 (hardcover) : 1482222051 (hardcover) |
Index Number: | TA2020 |
CLC: |
TN4 O539 |
Call Number: | O539/M235/2nd ed. |
Contents: | Phenomenological description of the charged particle transport -- Macroscopic plasma characteristics -- Elementary processes in gas phase and on surfaces -- The Boltzmann equation and transport equations of charged particles -- General properties of charged particle transport in gases -- Phenomenological description of the charged particle transport -- Phenomenological description of the charged particle transport -- Capacitively coupled plasma -- Inductively coupled plasma -- Magnetically enhanced plasma -- Plasma processing and related topics -- Atmospheric pressure, low temperature plasma |