Screen LibraryPlasma electronics : applications in microelectronic device fabrication /
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| Main Authors: | |
|---|---|
| Group Author: | |
| Published: |
CRC Press, Taylor & Francis Group,
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| Publisher Address: | Boca Raton : |
| Publication Dates: | [2015] |
| Literature type: | Book |
| Language: | English |
| Edition: | Second edition. |
| Subjects: | |
| Carrier Form: | xxxv, 376 pages : illustrations ; 24 cm |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: |
9781482222050 (hardcover) : 1482222051 (hardcover) |
| Index Number: | TA2020 |
| CLC: |
TN4 O539 |
| Call Number: | O539/M235/2nd ed. |
| Contents: | Phenomenological description of the charged particle transport -- Macroscopic plasma characteristics -- Elementary processes in gas phase and on surfaces -- The Boltzmann equation and transport equations of charged particles -- General properties of charged particle transport in gases -- Phenomenological description of the charged particle transport -- Phenomenological description of the charged particle transport -- Capacitively coupled plasma -- Inductively coupled plasma -- Magnetically enhanced plasma -- Plasma processing and related topics -- Atmospheric pressure, low temperature plasma |