Author Results for Makabe, T. Toshiaki

(Toshiaki)
Makabe,T.
edited by T. Makabe

1
Plasma electronics : applications in microelectronic device fabrication /

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Main Authors: Makabe, T. Toshiaki
Group Author: Petrović, Z
Published: CRC Press, Taylor & Francis Group,
Publication Dates: [2015]
Call Number: O539/M235/2nd ed.
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2
Advances in low temperature rf plasmas basis for process design

Cover is for reference only
Group Author: Makabe T.; (Toshiaki)
Published: North Holland/Elsevier,
Publication Dates: 2002.
Call Number: O539-1/A244
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