Screen LibraryInterferometric metrology：20-21 August 1987, San Diego, California
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| Corporate Authors: | ; |
|---|---|
| Group Author: | |
| Published: |
SPIE,
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| Publisher Address: | Bellingham, Wash., USA |
| Publication Dates: | c1988. |
| Literature type: | Book |
| Language: | English |
| Series: |
Critical reviews of optical science and technology ; v. 816 |
| Subjects: | |
| Carrier Form: | vi, 239 p.: ill. ; 28 cm. |
| ISBN: | 0892528516 |
| Index Number: | O348 |
| CLC: | O348.12-532 |
| Call Number: | O348.12-532/I611/1987 |
| Contents: |
"Conference 816, Interferometric metrology, was part of a four-conference program on Precision Instrument Design held at SPIE's 31st annual International Technical Symposium on Optical & Optoelectronic Applied Science & Engineering"--P. v. Includes bibliographies. |