Interferometric metrology:20-21 August 1987, San Diego, California
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Corporate Authors: | ; |
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Group Author: | |
Published: |
SPIE,
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Publisher Address: | Bellingham, Wash., USA |
Publication Dates: | c1988. |
Literature type: | Book |
Language: | English |
Series: |
Critical reviews of optical science and technology ; v. 816 |
Subjects: | |
Carrier Form: | vi, 239 p.: ill. ; 28 cm. |
ISBN: | 0892528516 |
Index Number: | O348 |
CLC: | O348.12-532 |
Call Number: | O348.12-532/I611/1987 |
Contents: |
"Conference 816, Interferometric metrology, was part of a four-conference program on Precision Instrument Design held at SPIE's 31st annual International Technical Symposium on Optical & Optoelectronic Applied Science & Engineering"--P. v. Includes bibliographies. |