Proceedings of the Symposium on Inorganic Resist Systems
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Corporate Authors: | ; ; ; |
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Group Author: | ; |
Published: |
Electrochemical Society,
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Publisher Address: | Pennington, NJ (10 South Main St., Pennington 08534) |
Publication Dates: | c1982. |
Literature type: | Book |
Language: | English |
Series: |
Proceedings / Electrochemical Society ; v. 82-9 |
Subjects: | |
Carrier Form: | vii, 310 p.: ill. ; 23 cm. |
Index Number: | TQ572 |
CLC: | TQ572.4-532 |
Call Number: | TQ572.4-532/S989/1982 |
Contents: |
Title on spine: Inorganic resist systems. Includes bibliographical references and indexes. |