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Proceedings of the Symposium on Inorganic Resist Systems

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Bibliographic Details
Corporate Authors: Symposium on Inorganic Resist Systems (1982 Montréal, Québec; Electrochemical Society. New Technology Subcommittee; Electrochemical Society. Dielectrics and Insulation Division; Electrochemical Society. Electronics Division
Group Author: Doane Daryl Ann; Heller Adam
Published: Electrochemical Society,
Publisher Address: Pennington, NJ (10 South Main St., Pennington 08534)
Publication Dates: c1982.
Literature type: Book
Language: English
Series: Proceedings / Electrochemical Society ; v. 82-9
Subjects:
Photoresists
Photolithography
Carrier Form: vii, 310 p.: ill. ; 23 cm.
Index Number: TQ572
CLC: TQ572.4-532
Call Number: TQ572.4-532/S989/1982
Contents: Title on spine: Inorganic resist systems.
Includes bibliographical references and indexes.

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