Rapid thermal processing of electronic materials:symposium held April 21-23, 1987, Anaheim California, U.S.A.
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Group Author: | ; ; |
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Published: |
Materials Research Society,
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Publisher Address: | Pittsburgh, Pa. |
Publication Dates: | c1987. |
Literature type: | Book |
Language: | English |
Series: |
Materials Research Society symposia proceedings ; v. 92 |
Subjects: | |
Carrier Form: | xvii, 485 p.: ill. ; 24 cm. |
ISBN: | 0931837596 |
Index Number: | TN305 |
CLC: | TN305-532 |
Call Number: | TN305-53/R218.1/1987/ |