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Rapid thermal and integrated processing II：symposium held April 12-15, 1993, San Francisco, California, U.S.A.

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Bibliographic Details
Corporate Authors: Symposium G, Rapid Thermal and Integrated Precessing (1993 San Francisco, Calif.) (San Francisco, Calif.))
Group Author: Gelpey Jeffrey C
Published: Materials Research Society,
Publisher Address: Pittsburgh, Pa.
Publication Dates: c1993.
Literature type: Book
Language: English
Series: Materials Research Society symposium proceedings ; v. 303
Subjects:
Semiconductor doping > Congresses
Vapor-plating > congresses
Semiconductors > Heat treatment > Congresses
Carrier Form: xii, 424 p.: ill. ; 24 cm.
ISBN: 1558991999
Index Number: TN305
CLC: TN305-532
Call Number: TN305-532/R218/1993/
Contents: "Papers ... presented at Symposium G, 'Rapid Thermal and Integrated Processing,' of the 1993 Spring Meeting of the Materials Research Society in San Francisco, California"--Pref.
Includes bibliographical references and indexes.

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