Screen LibraryPlasma processing：symposium held April 15-18, 1986, Palo Alto, California, U.S.A.
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| Corporate Authors: | |
|---|---|
| Group Author: | ; ; |
| Published: |
Materials Research Society,
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| Publisher Address: | Pittsburgh, Pa. |
| Publication Dates: | c1986. |
| Literature type: | Book |
| Language: | English |
| Series: |
Materials Research Society symposia proceedings ; v. 68 |
| Subjects: | |
| Carrier Form: | xvii, 463 p.: ill. ; 24 cm. |
| ISBN: | 0931837340 |
| Index Number: | O539 |
| CLC: | O539-532 |
| Call Number: | O539-53/P715/1986/ |
| Contents: | Includes bibliographies and indexes. |