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Proceedings of the Eighth Symposium on Plasma Processing

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Bibliographic Details
Corporate Authors: Symposium on Plasma Processing (8th 1990 Montr鈋al, Qu鈋bec
Group Author: Mathad G. S; Hess Dennis W
Published: Electrochemical Society,
Publisher Address: Pennington, NJ
Publication Dates: c1990.
Literature type: Book
Language: English
Series: The Electrochemical Society proceedings ; v. 90-14
Subjects:
Semiconductors > Etching > Congresses
Plasma etching > Congresses
Carrier Form: xi, 787 p.: ill. ; 23 cm.
Index Number: O539
CLC: O539-532
Contents: This proceedings volume contains the papers presented at the 8th Symposium on Plasma Processing, held in Montreal, Canada, May 6-11, 1990.
Includes bibliographical references and indexes.

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