Screen LibraryPrecision nanometrology：sensors and measuring systems for nanomanufacturing
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| Main Authors: | |
|---|---|
| Corporate Authors: | |
| Published: |
Springer,
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| Publisher Address: | London |
| Publication Dates: | 2010. |
| Literature type: | Book |
| Language: | English |
| Series: |
Springer series in advanced manufacturing |
| Subjects: | |
| Online Access: |
http://dx.doi.org/10.1007/978-1-84996-254-4 |
| Carrier Form: | xiii, 354 p.: ill. (some col.) ; 24 cm. |
| ISBN: |
9781849962537 1849962537 9781849962544 (electr. bk.) 1849962545 (ebook) |
| Index Number: | TB383 |
| CLC: | TB383 |
| Contents: | Includes bibliographical references and index. |