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Epitaxial silicon technology /

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Bibliographic Details
Corporate Authors: Elsevier Science & Technology.
Group Author: Baliga, B. Jayant, 1948-
Published: Academic Press,
Publisher Address: Orlando :
Publication Dates: 1986.
Literature type: eBook
Language: English
Subjects:
Semiconductors > Design and construction.
Silicon crystals > Growth.
Epitaxy.
Silicon-on-insulator technology.
Epitaxie.
Silicium.
Electronic books.
Online Access: http://www.sciencedirect.com/science/book/9780120771202
Carrier Form: 1 online resource (viii, 328 pages) : illustrations
Bibliography: Includes bibliographical references and index.
Index Number: TK7871
CLC: TN304.1
Contents: Silicon vapor phase epitaxy / H.M. Liaw and J.W. Rose -- Silicon molecular beam epitaxy / Subramanian S. Iyer -- Silicon liquid phase epitaxy / B. Jayant Baliga -- Silicon on sapphire heteroepitaxy / Prahalad K. Vasudev -- Silicon-on-insulator epitaxy / Hon Wai Lam.

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