Epitaxial silicon technology /
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Corporate Authors: | |
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Group Author: | |
Published: |
Academic Press,
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Publisher Address: | Orlando : |
Publication Dates: | 1986. |
Literature type: | eBook |
Language: | English |
Subjects: | |
Online Access: |
http://www.sciencedirect.com/science/book/9780120771202 |
Carrier Form: | 1 online resource (viii, 328 pages) : illustrations |
Bibliography: | Includes bibliographical references and index. |
Index Number: | TK7871 |
CLC: | TN304.1 |
Contents: | Silicon vapor phase epitaxy / H.M. Liaw and J.W. Rose -- Silicon molecular beam epitaxy / Subramanian S. Iyer -- Silicon liquid phase epitaxy / B. Jayant Baliga -- Silicon on sapphire heteroepitaxy / Prahalad K. Vasudev -- Silicon-on-insulator epitaxy / Hon Wai Lam. |