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Advanced microlithography technologies：8-10 November, 2004, Beijing, China

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Bibliographic Details
Corporate Authors: Zhongguo guang xue xue hui; Australian Optical Society; Guo jia zi ran ke xue ji jin wei yuan hui China; Society of Photo-Optical Instrumentation Engineers
Group Author: Yao Jun'en; Progler Christopher J; Wang Yangyuan
Published: SPIE,
Publisher Address: Bellingham, Wash.
Publication Dates: c2005.
Literature type: Book
Language: English
Series: SPIE proceedings series ; v. 5645
Subjects:
Integrated circuits > Masks
X-ray lithography
Manufacturing processes
Microlithography
Carrier Form: xi, 380 p.: ill. ; 28 cm.
ISBN: 0819456004
Index Number: TN405
CLC: TN405.7-532
Call Number: TN405.7-532/A244/2004
Contents: Includes bibliographical references and author index.

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