Optical microlithography XX:27 February - 2 March 2007, San Jose, California, USA
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Corporate Authors: | ; |
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Group Author: | |
Published: |
SPIE,
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Publisher Address: | Bellingham, Wash. |
Publication Dates: | c2007. |
Literature type: | Book |
Language: | English |
Series: |
Proceedings of SPIE ; v. 6520 |
Subjects: | |
Carrier Form: | 3 v.: ill. (some col.) ; 28 cm. |
ISBN: |
9780819466396 0819466395 |
Index Number: | TN405 |
CLC: |
TN405.7-532 TS828-532 |
Call Number: | TS828-532/O62/2007 |
Contents: | Includes bibliographical references and author index. |