Modeling aspects in optical metrology V : 23-25 June 2015, Munich, Germany /
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Corporate Authors: | ; ; |
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Group Author: | ; ; |
Published: |
SPIE,
|
Publisher Address: | Bellingham, Washington : |
Publication Dates: | [2015] |
Literature type: | Book |
Language: | English |
Series: |
Proceedings of SPIE,
volume 9526 |
Subjects: | |
Carrier Form: | 1 volume (various pagings) : illustrations ; 28 cm. |
Bibliography: | Includes bibliographical references. |
ISBN: |
9781628416862 (paperback) : 1628416866 (paperback) |
CLC: |
TN4-532 O432.2-532 |
Call Number: | O432.2-532/M689/2015 |