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Modeling aspects in optical metrology V : 23-25 June 2015, Munich, Germany /

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Bibliographic Details
Corporate Authors: SPIE Society; European Optical Society; German Scientific Laser Society Wissenschaftliche Gesellschaft Lasertechnik e.V
Group Author: Frenner, Karsten; Bodermann, Bernd; Silver, Richard M
Published: SPIE,
Publisher Address: Bellingham, Washington :
Publication Dates: [2015]
Literature type: Book
Language: English
Series: Proceedings of SPIE, volume 9526
Subjects:
Optical measurements > Congresses
Integrated circuits > Congresses
Semiconductors > Design and construction > Congresses
Carrier Form: 1 volume (various pagings) : illustrations ; 28 cm.
Bibliography: Includes bibliographical references.
ISBN: 9781628416862 (paperback) :
1628416866 (paperback)
CLC: TN4-532
O432.2-532
Call Number: O432.2-532/M689/2015

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